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Electron beam lithography
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1	APPLICATION NOTE PL ASMONICS Nanoscribe’s Photonic Professional GT system is the world’s highest resolution 3D printer. It offers resolution between what can be achieved with electron beam lithography and UV lithogra Add to Reading List Source URL: www.nanoscribe.de - Date: 2016-05-31 04:30:58
2	Journal of Photochemistry and Photobiology A: Chemistry–154 Nanopatterning with conformable phase masks Joana Maria a , Seokwoo Jeon a , John A. Rogers a,b,∗ a Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2004-09-07 14:36:00 Chemistry Materials science Electromagnetic radiation Microtechnology Photolithography Nanolithography Photoresist Electron-beam lithography Mask Ultraviolet Resist Atomic-force microscopy
3	Langmuir 2004, 20, Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing Add to Reading List Source URL: rogers.matse.illinois.edu Language: English - Date: 2004-09-07 14:36:00 Silicones Thin films Soft lithography Display technology Emerging technologies Microtechnology PDMS stamp Polydimethylsiloxane Self-assembled monolayer Nanotransfer printing Photolithography Electron beam physical vapor deposition
4	Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures S. Lemkea, J. Goettertb, T. Holubeka, B. Löchela, I. Rudolpha and T. Seligera a Helmholtz-Zentrum Berlin (HZB) für Materialien und Energie GmbH, Add to Reading List Source URL: www.camd.lsu.edu Language: English* - Date: 2012-08-02 10:08:48 Materials science Microtechnology Polymers Semiconductor device fabrication X-ray lithography Photolithography LIGA SU-8 photoresist Photoresist Nanolithography Beamline Electron-beam lithography
5	Nanofabrication with RAITH EBL and FIB equipment Satellite Workshop - ImagineNano 2015 Conference, Bilbao / Spain Bilbao Exhibition Centre Tuesday, 10th March 2015 from 15:00 to 18:30 Add to Reading List Source URL: www.imaginenano.com Language: English - Date: 2015-02-27 05:01:00 Fraunhofer Institute for Telecommunications Fraunhofer Society Telecommunications engineering Electron-beam lithography Nanolithography Fib
6	PRESS RELEASE Heidelberg Instruments and GenISys Announce Cooperation on Maskless Laser Lithography Heidelberg, GERMANY, October 21, 2014 – Heidelberg Instruments, a leading supplier of equipment and process solutions Add to Reading List Source URL: genisys-gmbh.com Language: English - Date: 2014-10-20 07:40:27 Microelectromechanical systems Photolithography Maskless lithography Electron beam lithography Lithography Semiconductor device fabrication Resist Nanotechnology Materials science Microtechnology Technology
7	KNMF Laboratory for Micro- and Nanostructuring Electron Beam Lithography E-Beam VB6 UHR-EWF • Substrate: 4” and 6“ wafer; special piece parts (on request) • High voltage: 100 kV Add to Reading List Source URL: www.knmf.kit.edu Language: English - Date: 2013-09-04 03:30:23
8	Electron Beam Lithography Josef Brown Mechanical Engineering Undergraduate Lithography Source Add to Reading List Source URL: www.emc.missouri.edu Language: English - Date: 2015-04-04 12:22:31 Resist Semiconductor device fabrication Electron beam lithography Lift-off Electron Lithography Materials science Microtechnology Physics
9	Nanofabrication state-of-the-art equipment, and with access to nearby cleanroom facilities, ICN2 offers a vast array of nanofabrication services for nanostructured materials and devices of varied composition for myriad a Add to Reading List Source URL: www.icn.cat Language: English - Date: 2013-10-29 07:46:04 Nanoimprint lithography Microtechnology Nanolithography Semiconductor device fabrication Electronics manufacturing Lithography Microelectromechanical systems Electron beam lithography Coating Chemistry Materials science Technology
10 $Chemistry / Focused ion beam / Nanoimprint lithography / Electron microscope / Electron diffraction / Nanolithography / Scanning transmission electron microscopy / Nanotechnology / Electron beam lithography / Electron microscopy / Scientific method / Science$	Technology Development, Commercial Opportunities and Services ICN2’s Technology Transfer Office mission is to facilitate the exploitation of research results, by transferring knowledge and technology developed at ICN2 Add to Reading List Source URL: www.icn.cat Language: English - Date: 2013-12-10 10:40:02 Chemistry Focused ion beam Nanoimprint lithography Electron microscope Electron diffraction Nanolithography Scanning transmission electron microscopy Nanotechnology Electron beam lithography Electron microscopy Scientific method Science

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